{"created":"2023-07-27T06:25:50.081242+00:00","id":9295,"links":{},"metadata":{"_buckets":{"deposit":"3f5a190f-8774-4a1e-aef5-3408655170ea"},"_deposit":{"created_by":3,"id":"9295","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"9295"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00009295","sets":["934:935:936"]},"author_link":["399","13331","13333","13332"],"item_4_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1990-01-01","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"1","bibliographicPageEnd":"145","bibliographicPageStart":"140","bibliographicVolumeNumber":"56","bibliographic_titles":[{"bibliographic_title":"精密工学会誌 = Journal of the Japan Society for Precision Engineering"}]}]},"item_4_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"A novel optical profiling method is proposed, which is nearly insensitive to vertical vibrations and able to measure the roughness of supersmooth surfaces on a long track. This method makes simultaneous height measurements of both a measurement position and its surroundings and perform subsequent digital subtraction of the latter from the former to obtain the roughness data. An instrument incorporated with this method is shown to have a height sensitivity of 0.1 nm under normal vibrational circumstance (0.4 cm/S2). Data obtained from measurements of a disk substrate, a mirror, an optical flat and a silicon wafer are included.","subitem_description_type":"Abstract"}]},"item_4_publisher_17":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"精密工学会 = The Japan Society for Precision Engineering"}]},"item_4_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"10.2493/jjspe.56.140","subitem_relation_type_select":"DOI"}}]},"item_4_relation_28":{"attribute_name":"関連URI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://www.jstage.jst.go.jp/browse/jjspe/-char/ja/","subitem_relation_type_select":"URI"}},{"subitem_relation_type_id":{"subitem_relation_type_id_text":"http://www.jspe.or.jp/","subitem_relation_type_select":"URI"}}]},"item_4_rights_23":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright © The Japan Society for Precision Engineering 精密工学会"}]},"item_4_source_id_11":{"attribute_name":"NCID","attribute_value_mlt":[{"subitem_source_identifier":"AN1003250X","subitem_source_identifier_type":"NCID"}]},"item_4_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0912-0289","subitem_source_identifier_type":"ISSN"}]},"item_4_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"安達, 正明"}],"nameIdentifiers":[{},{},{}]},{"creatorNames":[{"creatorName":"三木, 秀司"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"中井, 康秀"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"川口, 格"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-10-03"}],"displaytype":"detail","filename":"TE-PR-ADACHI-M-140.pdf","filesize":[{"value":"1.1 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"TE-PR-ADACHI-M-140.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/9295/files/TE-PR-ADACHI-M-140.pdf"},"version_id":"792592ad-3be6-4174-bd3c-c79f2947a476"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"上下振動の影響を受けない高精度粗さ測定法(第1報): オプティカルスキッド法の提案","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"上下振動の影響を受けない高精度粗さ測定法(第1報): オプティカルスキッド法の提案"},{"subitem_title":"Precision Profiling Method Insensitive to Vertical Vibrations (1st Report): A Proposition of an Optical Skid Method","subitem_title_language":"en"}]},"item_type_id":"4","owner":"3","path":["936"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-10-03"},"publish_date":"2017-10-03","publish_status":"0","recid":"9295","relation_version_is_last":true,"title":["上下振動の影響を受けない高精度粗さ測定法(第1報): オプティカルスキッド法の提案"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-07-28T01:56:35.699283+00:00"}