@article{oai:kanazawa-u.repo.nii.ac.jp:00009325,
 author = {安達, 正明 and 平野, 勇輝 and 河村, 昌範 and 岩尾, 雄太},
 issue = {11},
 journal = {精密工学会誌 = Journal of the Japan Society for Precision Engineering},
 month = {Jan},
 note = {Vertical-scanning shape-measurement interferometry using white light is widely used to measure 3D shape of objects having step-like shape. This interferometry however cannot be used under vibrating environment. Because, it is required to accurately repeat predefined-step movements over vertical measurement range. We developed new technology which can measure the changes of optical path difference (OPD) of an interference microscope with nanometer resolution. This uses a line camera and a FPGA device and can measure OPD changes with around 20-μs interval. We built this technology onto a vertical-scanning interferometer and estimated performance of the developed technology using some vibration conditions.},
 pages = {1299--1304},
 title = {振動環境でも利用できる垂直走査型光干渉応用形状計測技術},
 volume = {75},
 year = {2009}
}