{"created":"2023-07-27T06:25:51.339368+00:00","id":9325,"links":{},"metadata":{"_buckets":{"deposit":"c47be4d6-ca16-4818-95da-a2e383861683"},"_deposit":{"created_by":3,"id":"9325","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"9325"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00009325","sets":["934:935:936"]},"author_link":["399","13387","13388","13386"],"item_4_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2009-01-01","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"11","bibliographicPageEnd":"1304","bibliographicPageStart":"1299","bibliographicVolumeNumber":"75","bibliographic_titles":[{"bibliographic_title":"精密工学会誌 = Journal of the Japan Society for Precision Engineering"}]}]},"item_4_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Vertical-scanning shape-measurement interferometry using white light is widely used to measure 3D shape of objects having step-like shape. This interferometry however cannot be used under vibrating environment. Because, it is required to accurately repeat predefined-step movements over vertical measurement range. We developed new technology which can measure the changes of optical path difference (OPD) of an interference microscope with nanometer resolution. This uses a line camera and a FPGA device and can measure OPD changes with around 20-μs interval. We built this technology onto a vertical-scanning interferometer and estimated performance of the developed technology using some vibration conditions.","subitem_description_type":"Abstract"}]},"item_4_publisher_17":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"精密工学会 = The Japan Society for Precision Engineering"}]},"item_4_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"10.2493/jjspe.75.1299","subitem_relation_type_select":"DOI"}}]},"item_4_relation_28":{"attribute_name":"関連URI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://www.jstage.jst.go.jp/browse/jjspe/-char/ja/","subitem_relation_type_select":"URI"}},{"subitem_relation_type_id":{"subitem_relation_type_id_text":"http://www.jspe.or.jp/","subitem_relation_type_select":"URI"}}]},"item_4_rights_23":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright © The Japan Society for Precision Engineering 精密工学会"}]},"item_4_source_id_11":{"attribute_name":"NCID","attribute_value_mlt":[{"subitem_source_identifier":"AN1003250X","subitem_source_identifier_type":"NCID"}]},"item_4_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0912-0289","subitem_source_identifier_type":"ISSN"}]},"item_4_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"安達, 正明"}],"nameIdentifiers":[{},{},{}]},{"creatorNames":[{"creatorName":"平野, 勇輝"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"河村, 昌範"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"岩尾, 雄太"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-10-03"}],"displaytype":"detail","filename":"TE-PR-ADACHI-M-1299.pdf","filesize":[{"value":"3.0 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"TE-PR-ADACHI-M-1299.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/9325/files/TE-PR-ADACHI-M-1299.pdf"},"version_id":"7110d79e-c764-4405-b489-b71f0ea7bb5d"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"振動環境でも利用できる垂直走査型光干渉応用形状計測技術","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"振動環境でも利用できる垂直走査型光干渉応用形状計測技術"},{"subitem_title":"Vertical-Scanning Shape-Measurement Interferometry Applicable under Vibrating Environment","subitem_title_language":"en"}]},"item_type_id":"4","owner":"3","path":["936"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-10-03"},"publish_date":"2017-10-03","publish_status":"0","recid":"9325","relation_version_is_last":true,"title":["振動環境でも利用できる垂直走査型光干渉応用形状計測技術"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-07-28T01:56:11.271983+00:00"}