@article{oai:kanazawa-u.repo.nii.ac.jp:00009340, author = {山本, 桂一郎 and 黒部, 利次 and 中森, 啓介}, issue = {1}, journal = {精密工学会誌 = Journal of the Japan Society for Precision Engineering}, month = {Jan}, note = {Stainless steel orifice plate installed into a gas flow controlled device is necessary to finish an inner wall of it. High speed slurry flow finishing method developed in our laboratory has been applied to polish the inner wall of orifice plate. Present paper focuses on the relationship between finishing characteristics and gas flow rate through the finished orifice plate. Experiments are conducted under the conditions of high flow rate of slurry suspending the aluminum oxide grains into city water. It is found that surface roughness of the inner wall of trumped-shape hole has decreased with the flow pass number. SEM micrographs indicate that the stripe-pattern on inner wall surface of as-received orifice plate have disappeared with the slurry flow pass number, but the dimension of hole has increased in size. Measurements of gas flow volume through the polished orifice plate show that finishing charac-teristics influences on gas flow curve.}, pages = {79--83}, title = {ステンレス鋼製オリフィスプレート内壁面の高速流動研磨}, volume = {69}, year = {2003} }