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Effects of radio-frequency driving power, gas pressure, and nitrogen seeding on the transition dynamics in argon inductively coupled plasmas
http://hdl.handle.net/2297/14407
http://hdl.handle.net/2297/1440710f4dd30-0000-4a51-81f9-1ba8e6ed6bbd
| 名前 / ファイル | ライセンス | アクション |
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TE-PR-UESUGI-Y-4771.pdf (175.5 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2017-10-03 | |||||
| タイトル | ||||||
| タイトル | Effects of radio-frequency driving power, gas pressure, and nitrogen seeding on the transition dynamics in argon inductively coupled plasmas | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
Razzaka, M. Abdur
× Razzaka, M. Abdur× Takamura, Shuichi× Uesugi, Yoshihiko |
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| 提供者所属 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | 金沢大学理工研究域電子情報学系 | |||||
| 書誌情報 |
Journal of Applied Physics 巻 96, 号 9, p. 4771-4776, 発行日 2004-11-01 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0021-8979 | |||||
| NCID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00693547 | |||||
| DOI | ||||||
| 関連タイプ | isIdenticalTo | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1063/1.1790066 | |||||
| 出版者 | ||||||
| 出版者 | American Institute of Physics | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | The influences of if driving power, neutral gas pressure, and nitrogen seeding on the electrostatic-to-electromagnetic (E-H) mode transition dynamics in radio-frequency argon inductively coupled plasmas (ICPs) in a pressure range of 50-100 kPa are investigated, both experimentally and theoretically. The E-H mode transition dynamics and its characteristic transition time scale are investigated by observing the high-speed imaging (13 500 fps) as well as the temporal change of plasma loading impedance. The experimental results reveal that the E-H mode transition time is not fixed at any operating conditions rather it depends on some important parameters such as the rf driving power, neutral gas pressure, gas type. It is found that the E-H mode transition time depends on the unique parameter Eθ/p; the so-called effective induced electric field, rather than the independent parameter: the if power or neutral gas pressure. It is also found that longer E-H mode transition time is required to ignite the high-pressure Ar-N2 plasmas with a 2.5%-10% N2 seeding than that of pure Ar plasmas with the same operating conditions. The experimental results are compared with that of the recently developed theoretical models, and a good agreement is found between them. © 2004 American Institute of Physics. | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
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| 識別子タイプ | DOI | |||||
| 関連識別子 | http://dx.doi.org/10.1063/1.1790066 | |||||
