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Atomic oxygen sensing using a quartz crystal microbalance with a polymer thin film prepared by RF sputtering
http://hdl.handle.net/2297/25031
http://hdl.handle.net/2297/25031efc833e4-0d90-420b-893f-85b8b4abbc93
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
TE-PR-MATSUMOTO-H-61.pdf (119.1 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-10-03 | |||||
| タイトル | ||||||
| タイトル | Atomic oxygen sensing using a quartz crystal microbalance with a polymer thin film prepared by RF sputtering | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
Matsumoto, Hiroyuki
× Matsumoto, Hiroyuki× Matsuoka, Mikihiro× Iwamori, Satoru× Noda, Kazutoshi |
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| 提供者所属 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | 金沢大学理工研究域 / 現；岩崎電気株式会社技術研究所 | |||||
| 書誌情報 |
Sensors and Materials 巻 22, 号 2, p. 61-70, 発行日 2010-01-01 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0914-4935 | |||||
| NCID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA10790969 | |||||
| DOI | ||||||
| 関連タイプ | isIdenticalTo | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.18494/sam.2010.606 | |||||
| 出版者 | ||||||
| 出版者 | MYU Tokyo | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Polymer thin films, sputtered using a polyimide target on a quartz crystal, were investigated to determine their suitability for application in active oxygen sensors. Active oxygen generated under an inductively coupled plasma (ICP), particularly atomic oxygen radicals with a flux of 6.93x1013 atoms/cm2/s, was successfully detected from the frequency shift using a polymer-coated quartz crystal microbalance (QCM). To investigate the reaction mechanism between the polymer surface and atomic oxygen, chemical bonding was evaluated by electron spectroscopy for chemical analysis (ESCA) and surface morphology by atomic force microscopy (AFM). We also compared sputtercoated polymers with spin-coated polymers in terms of their sensing characteristics. We found that a sputter-coated polymer QCM has a great potential for atomic oxygen sensing. | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
