{"created":"2023-07-27T06:26:11.277324+00:00","id":9801,"links":{},"metadata":{"_buckets":{"deposit":"b8f23270-f048-4aa9-ba77-689fc56579d1"},"_deposit":{"created_by":3,"id":"9801","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"9801"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00009801","sets":["934:935:936"]},"author_link":["14336","11303","14337","14338"],"item_4_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2010-01-01","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"2","bibliographicPageEnd":"70","bibliographicPageStart":"61","bibliographicVolumeNumber":"22","bibliographic_titles":[{"bibliographic_title":"Sensors and Materials"}]}]},"item_4_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Polymer thin films, sputtered using a polyimide target on a quartz crystal, were investigated to determine their suitability for application in active oxygen sensors. Active oxygen generated under an inductively coupled plasma (ICP), particularly atomic oxygen radicals with a flux of 6.93x1013 atoms/cm2/s, was successfully detected from the frequency shift using a polymer-coated quartz crystal microbalance (QCM). To investigate the reaction mechanism between the polymer surface and atomic oxygen, chemical bonding was evaluated by electron spectroscopy for chemical analysis (ESCA) and surface morphology by atomic force microscopy (AFM). We also compared sputtercoated polymers with spin-coated polymers in terms of their sensing characteristics. We found that a sputter-coated polymer QCM has a great potential for atomic oxygen sensing.","subitem_description_type":"Abstract"}]},"item_4_description_5":{"attribute_name":"提供者所属","attribute_value_mlt":[{"subitem_description":"金沢大学理工研究域 / 現；岩崎電気株式会社技術研究所","subitem_description_type":"Other"}]},"item_4_publisher_17":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"MYU Tokyo"}]},"item_4_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"https://doi.org/10.18494/sam.2010.606","subitem_relation_type_select":"DOI"}}]},"item_4_source_id_11":{"attribute_name":"NCID","attribute_value_mlt":[{"subitem_source_identifier":"AA10790969","subitem_source_identifier_type":"NCID"}]},"item_4_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0914-4935","subitem_source_identifier_type":"ISSN"}]},"item_4_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Matsumoto, Hiroyuki"}],"nameIdentifiers":[{"nameIdentifier":"14336","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Matsuoka, Mikihiro"}],"nameIdentifiers":[{"nameIdentifier":"14337","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Iwamori, Satoru"}],"nameIdentifiers":[{"nameIdentifier":"11303","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"90345603","nameIdentifierScheme":"e-Rad","nameIdentifierURI":"https://kaken.nii.ac.jp/ja/search/?qm=90345603"},{"nameIdentifier":"90345603","nameIdentifierScheme":"研究者番号","nameIdentifierURI":"https://nrid.nii.ac.jp/nrid/1000090345603"}]},{"creatorNames":[{"creatorName":"Noda, Kazutoshi"}],"nameIdentifiers":[{"nameIdentifier":"14338","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-10-03"}],"displaytype":"detail","filename":"TE-PR-MATSUMOTO-H-61.pdf","filesize":[{"value":"119.1 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"TE-PR-MATSUMOTO-H-61.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/9801/files/TE-PR-MATSUMOTO-H-61.pdf"},"version_id":"d19416c2-b16d-4b08-84b3-3014fda8be51"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Atomic oxygen sensing using a quartz crystal microbalance with a polymer thin film prepared by RF sputtering","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Atomic oxygen sensing using a quartz crystal microbalance with a polymer thin film prepared by RF sputtering"}]},"item_type_id":"4","owner":"3","path":["936"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-10-03"},"publish_date":"2017-10-03","publish_status":"0","recid":"9801","relation_version_is_last":true,"title":["Atomic oxygen sensing using a quartz crystal microbalance with a polymer thin film prepared by RF sputtering"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2024-06-20T06:35:18.872878+00:00"}