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共鳴核反応分析法によるBCN膜の水素量測定(<特集>X線材料強度)
http://hdl.handle.net/2297/12316
http://hdl.handle.net/2297/12316fb3a9005-1000-44c5-a4a5-4e13605957c7
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
TE-PR-HIROSE-Y-727.pdf (412.1 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-10-03 | |||||
| タイトル | ||||||
| タイトル | 共鳴核反応分析法によるBCN膜の水素量測定(<特集>X線材料強度) | |||||
| タイトル | ||||||
| タイトル | Measurement of Hydrogen in BCN Films by Nuclear Reaction Analysis(Special Issue on X-Ray Study on Deformation and Fracture of Solid) | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
安井, 治之
× 安井, 治之× 広瀬, 幸雄× 佐々木, 敏彦× 粟津, 薫× 楢本, 洋 |
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| 提供者所属 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | 金沢大学大学院自然科学研究科 | |||||
| 書誌情報 |
材料=Journal of the Society of Materials Science, Japan 巻 50, 号 7, p. 727-731, 発行日 2001-07-15 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0514-5163 | |||||
| NCID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AN00096175 | |||||
| 出版者 | ||||||
| 出版者 | 日本材料学会 | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Hydrogen is a very common contaminant in carbon films. It can strongly influence on mechanical, physical and chemical properties of the films. The analysis of hydrogen is therefore a crucial problem produce the films with the properties required. Ion beam techniques using nuclear reactions are effective for the quantitative determination of hydrogen concentration. A specially designed spectrometer is employed for the detailed determination of hydrogen concentrations by detecting 4.43MeV γ-rays from the resonant nuclear reactions ^1H(^15N, αγ)^12C at the 6.385MeV. In this study, the BCN films were formed on silicon substrate by ion beam assisted deposition (IBAD), in which boron and carbon were deposited by electron beam heating of B_4C solid and nitrogen was supplied by ion implantation simultaneously. The concentrations of hydrogen in BCN films were measured using RNRA. The mechanical properties of BCN films were evaluated using an ultra-micro-hardness tester. It was confiremed that the hardness of BCN films increased with increasing the concentration of hydrogen. | |||||
| 権利 | ||||||
| 権利情報 | 日本材料学会；本文データは日本材料学会の許諾に基づきCiNiiから複製したものである | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| 関連URI | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://ci.nii.ac.jp/naid/110002292627/ | |||||
