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Electrochemically Synthesized Tin/Lithium Alloy to Convert Laser Light to Extreme Ultraviolet Light
https://doi.org/10.24517/00067087
https://doi.org/10.24517/0006708752613be8-68db-4209-af84-18541ec0c510
名前 / ファイル | ライセンス | アクション |
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FR-PR-NAGAI-K-3-12422.pdf (905.4 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2022-09-12 | |||||
タイトル | ||||||
タイトル | Electrochemically Synthesized Tin/Lithium Alloy to Convert Laser Light to Extreme Ultraviolet Light | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
ID登録 | ||||||
ID登録 | 10.24517/00067087 | |||||
ID登録タイプ | JaLC | |||||
著者 |
Nagai, Keiji
× Nagai, Keiji× Musgrave, Christopher S. A.× Kuwata, Naoaki× Kawamura, Junichi |
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著者別表示 |
長井, 圭治
× 長井, 圭治 |
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提供者所属 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 金沢大学先端科学・社会共創推進機構 | |||||
書誌情報 |
ACS Omega 巻 3, 号 10, p. 12422-12427, 発行日 2018-10-02 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 2470-1343 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1021/acsomega.8b01220 | |||||
出版者 | ||||||
出版者 | American Chemical Society | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | This paper describes lithium-tin alloys as a novel target material to enhance the efficiency of 13.5 nm extreme ultraviolet (EUV) light from generated laser-produced plasmas. Both lithium and tin exhibit EUV emission with the same peak at 13.5 nm. We show that lithium-tin (LiSn) alloys exhibit emission also at 13.5 nm and a mixture of tin and lithium emission by illuminating Nd:YAG laser (1 ns, 2.5 × 1010, 7.1 × 1010 W/cm2). The emission spectra and emission angular distribution by using phosphor imaging plates were analyzed to obtain the conversion efficiency from laser light to 13.5 nm light. The Li-Sn alloys were slightly higher than planar tin and between tin and lithium. It would be due to the suppression of self-absorption of 13.5 nm light by the tin plasma. Copyright © 2018 American Chemical Society. | |||||
権利 | ||||||
権利情報 | Copyright © 2018 American Chemical Society | |||||
権利 | ||||||
権利情報 | This is an open access article published under a Creative Commons Non-Commercial No Derivative Works (CC-BY-NC-ND) Attribution License, which permits copying and redistribution of the article, and creation of adaptations, all for non-commercial purposes. | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://pubs.acs.org/doi/10.1021/acsomega.8b01220 | |||||
関連名称 | https://pubs.acs.org/doi/10.1021/acsomega.8b01220 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://pubs.acs.org/journal/acsodf | |||||
関連名称 | http://pubs.acs.org/journal/acsodf | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://pubs.acs.org/ | |||||
関連名称 | http://pubs.acs.org/ |