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ラジアルシェア干渉計を用いる粗面の形状計測
http://hdl.handle.net/2297/42434
http://hdl.handle.net/2297/42434ec3a5c1a-04cb-4a35-8b26-1479ec014b01
名前 / ファイル | ライセンス | アクション |
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TE-PR-ADACHI-M-1236.pdf (3.6 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2017-10-03 | |||||
タイトル | ||||||
タイトル | ラジアルシェア干渉計を用いる粗面の形状計測 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Shape Measurement Method of Rough Surface using a Radial Shearing Interferometry | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
安達, 正明
× 安達, 正明× 大杉, 博人× 平林, 崇× 稲部, 勝幸 |
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書誌情報 |
精密工学会誌 = Journal of the Japan Society for Precision Engineering 巻 66, 号 8, p. 1236-1240, 発行日 2000-01-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0912-0289 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN1003250X | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.2493/jjspe.66.1236 | |||||
出版者 | ||||||
出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | A new shape measurement method of rough surface is proposed. The method utilizes a radial shearing interferometry consisting of two zoom lenses with different magnifying powers and a laser diode being able to change its wavelength in a small range less than 0.1 nm. The radial shearing interferometry, known as a kind of common path interferometer, is capable of obtaining a very stable specklegram even under normal vibrational circumstance. From the specklegrams two phase maps corresponding to two slightly different laser wavelengths are extracted. The difference of phase values between two maps is nearly independent of random speckle phase, but depends on optical path differences. Then shape of the rough surface can be calculated from the two phase maps through the optical path differences. The validity of the method is experimentally demonstrated. | |||||
権利 | ||||||
権利情報 | Copyright © The Japan Society for Precision Engineering 精密工学会 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/browse/jjspe/-char/ja/ | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://www.jspe.or.jp/ |