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Size distribution of droplets in film prepared by pulsed laser ablation
https://doi.org/10.24517/00007744
https://doi.org/10.24517/00007744e7f00952-93e8-40c5-b755-5eb5c8ad850b
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
TE-PR-MORIMOTO-S-705.pdf (573.5 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-10-03 | |||||
| タイトル | ||||||
| タイトル | Size distribution of droplets in film prepared by pulsed laser ablation | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| ID登録 | ||||||
| ID登録 | 10.24517/00007744 | |||||
| ID登録タイプ | JaLC | |||||
| 著者 |
Yonezawa, Yasuto
× Yonezawa, Yasuto× Minamikawa, Toshiharu× Matsuda, Kazuko× Takezawa, Katsuhito× Morimoto, Akiharu× Shimizu, Tatsuo |
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| 著者別表示 |
森本, 章治
× 森本, 章治× 清水, 立生 |
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| 提供者所属 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | 金沢大学設計製造技術研究所 / 金沢大学理工研究域電子情報学系 / 金沢大学工学部 | |||||
| 書誌情報 |
Applied Surface Science 巻 127-129, p. 639-644, 発行日 1998-05-01 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0169-4332 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1016/s0169-4332(97)00718-6 | |||||
| 出版者 | ||||||
| 出版者 | Elsevier | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Volume and size distribution of droplets in oxide films were investigated for a variety of laser fluences, wavelengths and target temperatures. Effects of both the ambient gas pressure and the substrate temperature on the droplet formation was investigated. It was found that the increase in the ratio of the droplet volume to the film volume Vd/Vf caused by increasing the maximum etching depth of target per laser shot de (Vd/Vfde3, as previously reported) due to changes in the deposition conditions other than the target temperature is mainly attributed to an increase in the formation of large droplets. It was also found that the correlation Vd/Vfde3 is also valid for elevated target-temperatures, and the increase in the target temperature enhances the formation of small droplets compared with large ones. The effect of cooling of droplets after the ejection from the target due to the ambient pressure and/or the substrate temperature is discussed. | |||||
| 著者版フラグ | ||||||
| 出版タイプ | AM | |||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
