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干渉顕微鏡観察下の粗面の垂直走査域100μmでの光路差変化の高精度測定
http://hdl.handle.net/2297/42411
http://hdl.handle.net/2297/42411943cd770-1c14-4e2b-81e7-e1bb6316070c
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2017-10-03 | |||||
タイトル | ||||||
タイトル | 干渉顕微鏡観察下の粗面の垂直走査域100μmでの光路差変化の高精度測定 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Precision OPD Change Measurement in a 100-μm Vertical-Scanning Range Using Rough-Surface Interferogram under an Interference Microscope | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
安達, 正明
× 安達, 正明× 河村, 昌範× 岩尾, 雄太 |
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書誌情報 |
精密工学会誌 = Journal of the Japan Society for Precision Engineering 巻 76, 号 7, p. 834-839, 発行日 2010-01-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0912-0289 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN1003250X | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.2493/jjspe.76.834 | |||||
出版者 | ||||||
出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | A vertical-scanning shape-measurement interference microscope using white light is widely used to measure 3D shape of a small object. This microscopy however cannot be used in vibrating environment. Because it is required to repeat one-way vertical movement of the predefined length and interferogram recording after that. We are researching a new technology which can accurately measure the real-time changes of optical path difference (OPD) and can trigger the recordings. When a rough surface is observed under the microscope, an interference pattern has very complex structures. To measure OPD change from the pattern, we use flexible masks to extract components of cosine change and sine change from the complex-structure change. Using the extracted changes we can obtain continuous phase change over a 100-μm vertical movement. But, the total phase change of the movement slightly depend on roughness of the measured area. This dependence is showed to be affected by a numerical aperture of an object-lens and can be reduced using a smaller aperture lens. | |||||
権利 | ||||||
権利情報 | Copyright © The Japan Society for Precision Engineering 精密工学会 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/browse/jjspe/-char/ja/ | |||||
関連URI | ||||||
識別子タ |