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磁性流体を利用したGLP (Grinding-like Polishing) の研究 (FFF): シリコンウエハの平面研磨特性
http://hdl.handle.net/2297/42792
http://hdl.handle.net/2297/4279225c58f11-585c-4675-809e-beadd6916cbd
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
TE-PR-KUROBE-T-1555.pdf (6.6 MB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-10-03 | |||||
| タイトル | ||||||
| タイトル | 磁性流体を利用したGLP (Grinding-like Polishing) の研究 (FFF): シリコンウエハの平面研磨特性 | |||||
| タイトル | ||||||
| タイトル | Study on GLP (Grinding-like Polishing) Using Magnetic Fluid (FFF): Surface Polishing Characteristics of Si-wafer | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
坂谷, 勝明
× 坂谷, 勝明× 黒部, 利次× 鈴木, 繁成× 廣崎, 憲一 |
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| 書誌情報 |
精密工学会誌 = Journal of the Japan Society for Precision Engineering 巻 61, 号 11, p. 1555-1559, 発行日 1995-01-01 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0912-0289 | |||||
| NCID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AN1003250X | |||||
| DOI | ||||||
| 関連タイプ | isIdenticalTo | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.2493/jjspe.61.1555 | |||||
| 出版者 | ||||||
| 出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | A new type of field-assisted fine polishing method for brittle materials has been proposed, which is developed for applying to the polishing on NC grinding machine without the vessel for polishing compound. In this method, the non-contact type polishing is realized with fluid grinding wheel which is covered with thick magnetic fluid film holding the abrasive grain. In this report, the surface polishing experiments are conducted on silicon wafers and the polishing characteristics are examined. The following results are obtained : (1) When the clearance between the polisher and the work surface exceeds the definite value, the polishing rate decreases extremely. (2) The use of water based magnetic fluid yields lower polishing rate but smoother surface in comparison with kerosene based magnetic fluid. (3) The surface roughness of polished surface basically depends on grain size and the roughness of the order of nanometers is obtained with fine abrasive grain. | |||||
| 権利 | ||||||
| 権利情報 | Copyright © The Japan Society for Precision Engineering 精密工学会 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| 関連URI | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://www.jstage.jst.go.jp/browse/jjspe/-char/ja/ | |||||
| 関連URI | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://www.jspe.or.jp/ | |||||
