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微細圧力制御による微小領域の形状修正研磨
http://hdl.handle.net/2297/42769
http://hdl.handle.net/2297/42769ba090523-0c3c-4b2a-88f0-0a97d12678ad
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
TE-PR-KUROBE-T-1642.pdf (1.2 MB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-10-03 | |||||
| タイトル | ||||||
| タイトル | 微細圧力制御による微小領域の形状修正研磨 | |||||
| タイトル | ||||||
| タイトル | Local Area Polishing of Glass by Fine Pressure Controlling | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
黒部, 利次
× 黒部, 利次× 山田, 良穂× 酒井, 直人× 上田, 修治× 新宮, 克喜 |
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| 書誌情報 |
精密工学会誌 = Journal of the Japan Society for Precision Engineering 巻 60, 号 11, p. 1642-1646, 発行日 1994-01-01 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0912-0289 | |||||
| NCID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AN1003250X | |||||
| DOI | ||||||
| 関連タイプ | isIdenticalTo | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.2493/jjspe.60.1642 | |||||
| 出版者 | ||||||
| 出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Local area polishing has been done by using a newly-developed fine pressure controlling machine. Fine pressure yielded by repulsive magnetic force between an electromagnet and permanent one, has proved to be excellent polishing performance on the optical glass. Polishing rate at any point on the workpiece should depend on the shape of a pad as well as the polishing condition, such as relative motion of polishing pad and workpiece. In the present study focusing on the reduction of surface waviness in the order of nanometer, the effects of pad shape on the polishing characteristics are experimentally and analytically examined. It is found that the profile of polished surface can be controlled by the shape of the polishing pad, and that the developed technique is very effective in the modification of the surface profile in nanometer scale. | |||||
| 権利 | ||||||
| 権利情報 | Copyright © The Japan Society for Precision Engineering 精密工学会 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| 関連URI | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://www.jstage.jst.go.jp/browse/jjspe/-char/ja/ | |||||
| 関連URI | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://www.jspe.or.jp/ | |||||
