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磁性スラリーによる硬ぜい性材料の精密研磨 (FFF): 磁場可変の効果
http://hdl.handle.net/2297/42767
http://hdl.handle.net/2297/4276755d12d69-57fd-471c-97fc-d1e4bea6ce58
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
TE-PR-KUROBE-T-1143.pdf (1.1 MB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-10-03 | |||||
| タイトル | ||||||
| タイトル | 磁性スラリーによる硬ぜい性材料の精密研磨 (FFF): 磁場可変の効果 | |||||
| タイトル | ||||||
| タイトル | Development of Flexible Polishing Method Using Magnetic Slurry: Effect of Movable Parmanent Magnet on Polishing Characteristics | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
黒部, 利次
× 黒部, 利次× 山下, 勝久× 坂谷, 勝明 |
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| 書誌情報 |
精密工学会誌 = Journal of the Japan Society for Precision Engineering 巻 63, 号 8, p. 1143-1147, 発行日 1997-01-01 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0912-0289 | |||||
| NCID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AN1003250X | |||||
| DOI | ||||||
| 関連タイプ | isIdenticalTo | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.2493/jjspe.63.1143 | |||||
| 出版者 | ||||||
| 出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Magnetic field-assisted fine polishing method has been proposed, which uses a magnetic slurry mixed non-ferrous abrasives into a magnetic fluid. Polishing machine has newly been developed which is consisted both of copper rotary disc set a strong permanent magnet and a rotary shaft set similar one, it is mounted a specimen to be polished. Magnetic field strength controlled by moving their magnets is responsible for yielding superior surface quality. It is found that polishing machine has high performance finishing ability and the usage of a variety of magnetic fluid is proposed versatile polishing characteristics. Experiments show that kerosene based magnetic fluid has very high polishing performance compared with water based one. The usage of coarse grain gives rise to increase the surface roughnes, and larger clearance between specimen and copper rotary disc lowers finishing rate of wafer in kerosene based magnetic fluid especially. Movement of permanent magnet in copper rotary disc is very effective for finishing of wafer. | |||||
| 権利 | ||||||
| 権利情報 | Copyright © The Japan Society for Precision Engineering 精密工学会 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| 関連URI | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://www.jstage.jst.go.jp/browse/jjspe/-char/ja/ | |||||
| 関連URI | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://www.jspe.or.jp/ | |||||
