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半導体レーザの狭域波長走査を用いたスペックル干渉計での粗面の形状計測
http://hdl.handle.net/2297/42431
http://hdl.handle.net/2297/4243139fbe211-fbd8-454d-a779-6884601775b8
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
TE-PR-ADACHI-M-1497.pdf (2.3 MB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-10-03 | |||||
| タイトル | ||||||
| タイトル | 半導体レーザの狭域波長走査を用いたスペックル干渉計での粗面の形状計測 | |||||
| タイトル | ||||||
| タイトル | Shape measurement of diffuse objects using short-range scanning of laser diode wavelength in speckle interferometry | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
安達, 正明
× 安達, 正明× 舛岡, 淳司× 稲部, 勝幸 |
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| 書誌情報 |
精密工学会誌 = Journal of the Japan Society for Precision Engineering 巻 67, 号 9, p. 1497-1501, 発行日 2001-01-01 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0912-0289 | |||||
| NCID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AN1003250X | |||||
| DOI | ||||||
| 関連タイプ | isIdenticalTo | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.2493/jjspe.67.1497 | |||||
| 出版者 | ||||||
| 出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | A phase φ of specklegram is a function both of an optical path difference L and wavelength λ . From this function, the optical path difference L, which is directly used to calculate a shape of an object, can be given as a function of d φ/d λ. In the proposed technique, a widely used laser diode is adopted as a wavelength-changeable light source, and its wavelength λ is scanned slowly within 0.25 nm by using current injection control of the diode. From specklegrams captured during wavelength scanning, changing amounts of φ are extracted on individual pixels with a modified phase shifting technique. Since a scanning range is very short, it is difficult to measure a changing amount of λ along each specklegram capturing. Then a reference height step is also inserted in a vision of CCD camera and changing amounts of φ are measured both on the reference step and the object. From the ratio of the total changing amounts of φ, the shape of the object is calculated. Experiments are carried out to confirm the validity of the method. | |||||
| 権利 | ||||||
| 権利情報 | Copyright © The Japan Society for Precision Engineering 精密工学会 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| 関連URI | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://www.jstage.jst.go.jp/browse/jjspe/-char/ja/ | |||||
| 関連URI | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://www.jspe.or.jp/ | |||||
