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繊維配向を有する TiN および TiCN 薄膜の熱による残留応力変化にともなう機械的強度への一影響(<特集>X 線材料強度)
http://hdl.handle.net/2297/16794
http://hdl.handle.net/2297/16794779a82e9-8a66-4f66-9540-121623468287
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
TE-PR-GOTOH-M-744.pdf (773.1 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2017-10-03 | |||||
| タイトル | ||||||
| タイトル | 繊維配向を有する TiN および TiCN 薄膜の熱による残留応力変化にともなう機械的強度への一影響(<特集>X 線材料強度) | |||||
| タイトル | ||||||
| タイトル | An Effect of Residual Stress on Mechanical Strength of TiN and TiCN Thin Films Having Fiber Texture due to Heat Treatment(<Special Issue>X-Ray Study on Deformation and Fracture of Solid) | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
後藤, 昌英
× 後藤, 昌英× 佐々木, 敏彦× 広瀬, 幸雄 |
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| 提供者所属 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | 金沢大学大学院自然科学研究科（工学系） | |||||
| 書誌情報 |
材料 = Journal of the Society of Materials Science, Japan 巻 52, 号 7, p. 744-749, 発行日 2003-07-15 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0514-5163 | |||||
| NCID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AN00096175 | |||||
| 出版者 | ||||||
| 出版者 | 日本材料学会 = Society of Materials Science, Japan | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | TiN and TiCN thin films are used as antiwear layer on parts such as metal cutting tools. It is reported that the thin films that are deposited ceramics and metals have preferred orientation, and that the residual stresses generate by the difference in the coefficients of thermal expansion between the thin films and the substrate. Tools coated with TiN and TiCN films are heated to high temperature during service due to the frictional heat. Under this condition, the texture and the residual stress should change due to the heat. In the material engineering, it is well known that the residual stress in the material affects the mechanical strength of the industrial products. The purpose of this study is to examine the effect of the residual stress on the mechanical strength of TiN and TiCN thin films having preferred orientation. In this study, speciments that are deposited TiN and TiCN respectively by Physical Vapor Deposition (PVD) were annealed in a furnace at temperature of 573K, 798K, 843K and 893K. Using X-ray diffraction technique, the crystallite orientation was evaluated by the pole figure and the crystallite orientation distribution function (ODF). The films exhibited {111} fiber texture. After that, the residual stress of thin films was measured using CoKα radiation with the two-exposure method at Ψ=39°and 75°. Since the relationship between the mechanical strength and the residual stress has not been revealed about the thin film materials, the effect of the residual stress on the mechanical strength of the TiN and TiCN thin films having preferred orientation was investigated by the dynamic hardness (DH) and the scratch test. As a result, although the ODF little changed due to the heat treatment, the residual compressive stress relaxed at higher temperatures than 573K. As for the hardness of thin films, the residual stress did not affect the hardness. However, the residual stress influenced the behavior of the scratch test. The abrasive wear and the micro cracks were decreased by highly residual compressive stress. | |||||
| 権利 | ||||||
| 権利情報 | 本文データは日本材料学会の許諾に基づきCiNiiから複製したものである | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| 関連URI | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://ci.nii.ac.jp/naid/110002302163/ | |||||
