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02aC05 シリコン(001)微斜面の成長時のステップのバンチング :結晶成長理論 (2), 第36回結晶成長国内会議
https://doi.org/10.24517/00028533
https://doi.org/10.24517/00028533ead464c3-f73d-4d7a-85ba-9dcf27a082be
名前 / ファイル | ライセンス | アクション |
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CS-PR-SATO-M-288.pdf (121.0 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2017-10-05 | |||||
タイトル | ||||||
タイトル | 02aC05 シリコン(001)微斜面の成長時のステップのバンチング :結晶成長理論 (2), 第36回結晶成長国内会議 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | 02aC05 Step bunching on a Si(001) Vicinal Face in Growth(NCCG-36) | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
ID登録 | ||||||
ID登録 | 10.24517/00028533 | |||||
ID登録タイプ | JaLC | |||||
著者 |
佐藤, 正英
× 佐藤, 正英 |
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著者別表示 |
Sato, Masahide
× Sato, Masahide |
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提供者所属 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 金沢大学総合メディア基盤センター | |||||
書誌情報 |
Journal of the Japanese Association of Crystal Growth = 日本結晶成長学会誌 巻 33, 号 4, p. 288, 発行日 2006-11-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0385-6275 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00188386 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.19009/jjacg.33.4_288 | |||||
出版者 | ||||||
出版者 | The Japanese Association for Crystal Growth (JACG) = 日本結晶成長学会 | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | By using a step flow model, we study step bunching on a Si(001) vicinal face in growth On the Si(001) vicinal face, rough steps arid smooth steps appear alternately and the anisotropy of the surface diffsuiori changes on consecutive terraces. With the alternation of the diffusion coefficients, the vicinal face is stable for the step bunching. When the aternation of the kinetic coefficients are taken into account as the difference of the two types of steps, the step bunching occurs if the steps are impermeable. | |||||
権利 | ||||||
権利情報 | 本文データは日本結晶成長学会の許諾に基づきCiNiiから複製したものである | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://wwwsoc.nii.ac.jp/jacg/ | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://ci.nii.ac.jp/naid/110006208551/en/ | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/browse/jjacg/-char/ja | |||||
関連名称 | https://www.jstage.jst.go.jp/browse/jjacg/-char/ja | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://www.jacg.jp/ | |||||
関連名称 | http://www.jacg.jp/ |