WEKO3
インデックスリンク
アイテム
High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas
https://doi.org/10.24517/00067095
https://doi.org/10.24517/00067095e67fc209-a30b-4155-ad2e-fe5c51171162
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
FR-PR-NAGAI-K-88-033506.pdf (6.4 MB)
|
.png)
|
| Item type | 学術雑誌論文 / Journal Article(1) | |||||||
|---|---|---|---|---|---|---|---|---|
| 公開日 | 2022-09-12 | |||||||
| タイトル | ||||||||
| タイトル | High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas | |||||||
| 言語 | ||||||||
| 言語 | eng | |||||||
| 資源タイプ | ||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||
| 資源タイプ | journal article | |||||||
| ID登録 | ||||||||
| ID登録 | 10.24517/00067095 | |||||||
| ID登録タイプ | JaLC | |||||||
| 著者 |
Musgrave, Christopher S. A.
× Musgrave, Christopher S. A.× Murakami, Takehiro× Ugomori, Teruyuki× Yoshida, Kensuke× Fujioka, Shinsuke× Nishimura, Hiroaki× Atarashi, Hironori× Iyoda, Tomokazu× Nagai, Keiji |
|||||||
| 著者別表示 |
長井, 圭治
× 長井, 圭治
|
|||||||
| 提供者所属 | ||||||||
| 内容記述タイプ | Other | |||||||
| 内容記述 | 金沢大学先端科学・社会共創推進機構 | |||||||
| 書誌情報 |
Review of Scientific Instruments 巻 88, 号 3, p. 033506, 発行日 2017-03-21 |
|||||||
| ISSN | ||||||||
| 収録物識別子タイプ | ISSN | |||||||
| 収録物識別子 | 0034-6748 | |||||||
| ISSN | ||||||||
| 収録物識別子タイプ | ISSN | |||||||
| 収録物識別子 | 1089-7623 | |||||||
| NCID | ||||||||
| 収録物識別子タイプ | NCID | |||||||
| 収録物識別子 | AA12442307 | |||||||
| DOI | ||||||||
| 関連タイプ | isIdenticalTo | |||||||
| 識別子タイプ | DOI | |||||||
| 関連識別子 | 10.1063/1.4978526 | |||||||
| 出版者 | ||||||||
| 出版者 | American Institute of Physics Inc. | |||||||
| 抄録 | ||||||||
| 内容記述タイプ | Abstract | |||||||
| 内容記述 | With the advent of high volume manufacturing capabilities by extreme ultraviolet lithography, constant improvements in light source design and cost-efficiency are required. Currently, light intensity and conversion efficiency (CE) measurments are obtained by charged couple devices, faraday cups etc, but also phoshpor imaging plates (IPs) (BaFBr:Eu). IPs are sensitive to light and high-energy species, which is ideal for studying extreme ultraviolet (EUV) light from laser produced plasmas (LPPs). In this work, we used IPs to observe a large angular distribution (10°-90°). We ablated a tin target by high-energy lasers (1064 nm Nd:YAG, 1010 and 1011 W/cm2) to generate the EUV light. The europium ions in the IP were trapped in a higher energy state from exposure to EUV light and high-energy species. The light intensity was angular dependent; therefore excitation of the IP depends on the angle, and so highly informative about the LPP. We obtained high-space resolution (345 μm, 0.2°) angular distribution and grazing spectrometer (5-20 nm grate) data simultaneously at different target to IP distances (103 mm and 200 mm). Two laser systems and IP types (BAS-TR and BAS-SR) were also compared. The cosine fitting values from the IP data were used to calculate the CE to be 1.6% (SD ± 0.2) at 13.5 nm 2% bandwidth. Finally, a practical assessment of IPs and a damage issue are disclosed. © 2017 Author(s). | |||||||
| 内容記述 | ||||||||
| 内容記述タイプ | Other | |||||||
| 内容記述 | Embargo Period 12 months | |||||||
| 権利 | ||||||||
| 権利情報 | Copyright © 2017 Author(s). | |||||||
| 著者版フラグ | ||||||||
| 出版タイプ | VoR | |||||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||
| 関連URI | ||||||||
| 識別子タイプ | URI | |||||||
| 関連識別子 | https://aip.scitation.org/doi/10.1063/1.4978526 | |||||||
| 関連名称 | https://aip.scitation.org/doi/10.1063/1.4978526 | |||||||
| 関連URI | ||||||||
| 識別子タイプ | URI | |||||||
| 関連識別子 | https://aip.scitation.org/journal/rsi | |||||||
| 関連名称 | https://aip.scitation.org/journal/rsi | |||||||
| 関連URI | ||||||||
| 識別子タイプ | URI | |||||||
| 関連識別子 | https://aip.scitation.org/journal/rsi | |||||||
| 関連名称 | https://aip.scitation.org/journal/rsi | |||||||
