{"_buckets": {"deposit": "a347e5c5-6ecd-4c2d-b00e-8fbd0dda698c"}, "_deposit": {"created_by": 18, "id": "60850", "owners": [18], "pid": {"revision_id": 0, "type": "depid", "value": "60850"}, "status": "published"}, "_oai": {"id": "oai:kanazawa-u.repo.nii.ac.jp:00060850", "sets": ["2276"]}, "author_link": ["107112", "107109", "107060", "107027", "107108", "107059", "107028", "107081", "107107"], "item_4_biblio_info_8": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2017-03-21", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "3", "bibliographicPageStart": "033506", "bibliographicVolumeNumber": "88", "bibliographic_titles": [{"bibliographic_title": "Review of Scientific Instruments"}]}]}, "item_4_creator_33": {"attribute_name": "著者別表示", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "長井, 圭治"}], "nameIdentifiers": [{"nameIdentifier": "107027", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "30280803", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://kaken.nii.ac.jp/ja/search/?qm=30280803"}]}]}, "item_4_description_21": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "With the advent of high volume manufacturing capabilities by extreme ultraviolet lithography, constant improvements in light source design and cost-efficiency are required. Currently, light intensity and conversion efficiency (CE) measurments are obtained by charged couple devices, faraday cups etc, but also phoshpor imaging plates (IPs) (BaFBr:Eu). IPs are sensitive to light and high-energy species, which is ideal for studying extreme ultraviolet (EUV) light from laser produced plasmas (LPPs). In this work, we used IPs to observe a large angular distribution (10°-90°). We ablated a tin target by high-energy lasers (1064 nm Nd:YAG, 1010 and 1011 W/cm2) to generate the EUV light. The europium ions in the IP were trapped in a higher energy state from exposure to EUV light and high-energy species. The light intensity was angular dependent; therefore excitation of the IP depends on the angle, and so highly informative about the LPP. We obtained high-space resolution (345 μm, 0.2°) angular distribution and grazing spectrometer (5-20 nm grate) data simultaneously at different target to IP distances (103 mm and 200 mm). Two laser systems and IP types (BAS-TR and BAS-SR) were also compared. The cosine fitting values from the IP data were used to calculate the CE to be 1.6% (SD ± 0.2) at 13.5 nm 2% bandwidth. Finally, a practical assessment of IPs and a damage issue are disclosed. © 2017 Author(s).", "subitem_description_type": "Abstract"}]}, "item_4_description_22": {"attribute_name": "内容記述", "attribute_value_mlt": [{"subitem_description": "Embargo Period 12 months", "subitem_description_type": "Other"}]}, "item_4_description_5": {"attribute_name": "提供者所属", "attribute_value_mlt": [{"subitem_description": "金沢大学先端科学・社会共創推進機構", "subitem_description_type": "Other"}]}, "item_4_identifier_registration": {"attribute_name": "ID登録", "attribute_value_mlt": [{"subitem_identifier_reg_text": "10.24517/00067095", "subitem_identifier_reg_type": "JaLC"}]}, "item_4_publisher_17": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institute of Physics Inc."}]}, "item_4_relation_12": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isIdenticalTo", "subitem_relation_type_id": {"subitem_relation_type_id_text": "10.1063/1.4978526", "subitem_relation_type_select": "DOI"}}]}, "item_4_relation_28": {"attribute_name": "関連URI", "attribute_value_mlt": [{"subitem_relation_name": [{"subitem_relation_name_text": "https://aip.scitation.org/doi/10.1063/1.4978526"}], "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://aip.scitation.org/doi/10.1063/1.4978526", "subitem_relation_type_select": "URI"}}, {"subitem_relation_name": [{"subitem_relation_name_text": "https://aip.scitation.org/journal/rsi"}], "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://aip.scitation.org/journal/rsi", "subitem_relation_type_select": "URI"}}, {"subitem_relation_name": [{"subitem_relation_name_text": "https://aip.scitation.org/journal/rsi"}], "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://aip.scitation.org/journal/rsi", "subitem_relation_type_select": "URI"}}]}, "item_4_rights_23": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright © 2017 Author(s)."}]}, "item_4_source_id_11": {"attribute_name": "NCID", "attribute_value_mlt": [{"subitem_source_identifier": "AA12442307", "subitem_source_identifier_type": "NCID"}]}, "item_4_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0034-6748", "subitem_source_identifier_type": "ISSN"}, {"subitem_source_identifier": "1089-7623", "subitem_source_identifier_type": "ISSN"}]}, "item_4_version_type_25": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Musgrave, Christopher S. A."}], "nameIdentifiers": [{"nameIdentifier": "107028", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Murakami, Takehiro"}], "nameIdentifiers": [{"nameIdentifier": "107107", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Ugomori, Teruyuki"}], "nameIdentifiers": [{"nameIdentifier": "107108", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Yoshida, Kensuke"}], "nameIdentifiers": [{"nameIdentifier": "107109", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Fujioka, Shinsuke"}], "nameIdentifiers": [{"nameIdentifier": "107059", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Nishimura, Hiroaki"}], "nameIdentifiers": [{"nameIdentifier": "107060", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Atarashi, Hironori"}], "nameIdentifiers": [{"nameIdentifier": "107112", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Iyoda, Tomokazu"}], "nameIdentifiers": [{"nameIdentifier": "107081", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Nagai, Keiji"}], "nameIdentifiers": [{"nameIdentifier": "107027", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "30280803", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://kaken.nii.ac.jp/ja/search/?qm=30280803"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2022-09-12"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "FR-PR-NAGAI-K-88-033506.pdf", "filesize": [{"value": "6.4 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_11", "mimetype": "application/pdf", "size": 6400000.0, "url": {"label": "FR-PR-NAGAI-K-88-033506.pdf", "url": "https://kanazawa-u.repo.nii.ac.jp/record/60850/files/FR-PR-NAGAI-K-88-033506.pdf"}, "version_id": "6cd1371f-44c7-4431-9a22-c26360fb17f5"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas"}]}, "item_type_id": "4", "owner": "18", "path": ["2276"], "permalink_uri": "https://doi.org/10.24517/00067095", "pubdate": {"attribute_name": "公開日", "attribute_value": "2022-09-12"}, "publish_date": "2022-09-12", "publish_status": "0", "recid": "60850", "relation": {}, "relation_version_is_last": true, "title": ["High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas"], "weko_shared_id": -1}