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  1. K-3. 先端科学・社会共創推進機構
  2. k-3 10. 学術雑誌掲載論文
  3. 1. 査読済論文

High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas

https://doi.org/10.24517/00067095
https://doi.org/10.24517/00067095
e67fc209-a30b-4155-ad2e-fe5c51171162
名前 / ファイル ライセンス アクション
FR-PR-NAGAI-K-88-033506.pdf FR-PR-NAGAI-K-88-033506.pdf (6.4 MB)
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Item type 学術雑誌論文 / Journal Article(1)
公開日 2022-09-12
タイトル
タイトル High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
ID登録
ID登録 10.24517/00067095
ID登録タイプ JaLC
著者 Musgrave, Christopher S. A.

× Musgrave, Christopher S. A.

WEKO 107028

Musgrave, Christopher S. A.

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Murakami, Takehiro

× Murakami, Takehiro

WEKO 107107

Murakami, Takehiro

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Ugomori, Teruyuki

× Ugomori, Teruyuki

WEKO 107108

Ugomori, Teruyuki

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Yoshida, Kensuke

× Yoshida, Kensuke

WEKO 107109

Yoshida, Kensuke

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Fujioka, Shinsuke

× Fujioka, Shinsuke

WEKO 107059

Fujioka, Shinsuke

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Nishimura, Hiroaki

× Nishimura, Hiroaki

WEKO 107060

Nishimura, Hiroaki

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Atarashi, Hironori

× Atarashi, Hironori

WEKO 107112

Atarashi, Hironori

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Iyoda, Tomokazu

× Iyoda, Tomokazu

WEKO 107081

Iyoda, Tomokazu

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Nagai, Keiji

× Nagai, Keiji

WEKO 107027
e-Rad 30280803

Nagai, Keiji

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著者別表示 長井, 圭治

× 長井, 圭治

長井, 圭治

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提供者所属
内容記述タイプ Other
内容記述 金沢大学先端科学・社会共創推進機構
書誌情報 Review of Scientific Instruments

巻 88, 号 3, p. 033506, 発行日 2017-03-21
ISSN
収録物識別子タイプ ISSN
収録物識別子 0034-6748
ISSN
収録物識別子タイプ ISSN
収録物識別子 1089-7623
NCID
収録物識別子タイプ NCID
収録物識別子 AA12442307
DOI
関連タイプ isIdenticalTo
識別子タイプ DOI
関連識別子 10.1063/1.4978526
出版者
出版者 American Institute of Physics Inc.
抄録
内容記述タイプ Abstract
内容記述 With the advent of high volume manufacturing capabilities by extreme ultraviolet lithography, constant improvements in light source design and cost-efficiency are required. Currently, light intensity and conversion efficiency (CE) measurments are obtained by charged couple devices, faraday cups etc, but also phoshpor imaging plates (IPs) (BaFBr:Eu). IPs are sensitive to light and high-energy species, which is ideal for studying extreme ultraviolet (EUV) light from laser produced plasmas (LPPs). In this work, we used IPs to observe a large angular distribution (10°-90°). We ablated a tin target by high-energy lasers (1064 nm Nd:YAG, 1010 and 1011 W/cm2) to generate the EUV light. The europium ions in the IP were trapped in a higher energy state from exposure to EUV light and high-energy species. The light intensity was angular dependent; therefore excitation of the IP depends on the angle, and so highly informative about the LPP. We obtained high-space resolution (345 μm, 0.2°) angular distribution and grazing spectrometer (5-20 nm grate) data simultaneously at different target to IP distances (103 mm and 200 mm). Two laser systems and IP types (BAS-TR and BAS-SR) were also compared. The cosine fitting values from the IP data were used to calculate the CE to be 1.6% (SD ± 0.2) at 13.5 nm 2% bandwidth. Finally, a practical assessment of IPs and a damage issue are disclosed. © 2017 Author(s).
内容記述
内容記述タイプ Other
内容記述 Embargo Period 12 months
権利
権利情報 Copyright © 2017 Author(s).
著者版フラグ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
関連URI
識別子タイプ URI
関連識別子 https://aip.scitation.org/doi/10.1063/1.4978526
関連名称 https://aip.scitation.org/doi/10.1063/1.4978526
関連URI
識別子タイプ URI
関連識別子 https://aip.scitation.org/journal/rsi
関連名称 https://aip.scitation.org/journal/rsi
関連URI
識別子タイプ URI
関連識別子 https://aip.scitation.org/journal/rsi
関連名称 https://aip.scitation.org/journal/rsi
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