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Diagnosis of large volume pulse modulated Ar-H2 plasmas
http://hdl.handle.net/2297/1849
http://hdl.handle.net/2297/18495f05d9f1-b67a-4d44-8666-7bb20f59c22f
名前 / ファイル | ライセンス | アクション |
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00829351.pdf (128.6 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2017-10-03 | |||||
タイトル | ||||||
タイトル | Diagnosis of large volume pulse modulated Ar-H2 plasmas | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Paul, K.C.
× Paul, K.C.× Tanaka, Yasunori× Sakuta, T. |
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提供者所属 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 金沢大学工学部 | |||||
書誌情報 |
IEEE International Conference on Plasma Science (ICOPS) p. 128-128, 発行日 1999-06-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0730-9244 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1109/plasma.1999.829351 | |||||
出版者 | ||||||
出版者 | IEEE | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Atmospheric pressure plasma in pre-mixed Ar/H2 flow was generated by pulse-modulation method. The coil length of the inductively-coupled plasma (ICP) torch was extremely large. The source side power was 30 kW before pulsation, and thus the plasma power had around 25.6 kW considering 85% matching efficiency. | |||||
権利 | ||||||
権利情報 | ©1999 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.” IEEE International Conference on Plasma Science,1999, pp. 128 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |