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Growth of preferentially-oriented AlN films on amorphous substrate by pulsed laser deposition
https://doi.org/10.24517/00008329
https://doi.org/10.24517/00008329c9c64606-1efe-46fd-b559-5ee452424904
名前 / ファイル | ライセンス | アクション |
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TE-PR-MORIMOTO-A-3007.pdf (2.4 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2017-10-03 | |||||
タイトル | ||||||
タイトル | Growth of preferentially-oriented AlN films on amorphous substrate by pulsed laser deposition | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
ID登録 | ||||||
ID登録 | 10.24517/00008329 | |||||
ID登録タイプ | JaLC | |||||
著者 |
Wang, Z. P.
× Wang, Z. P.× Morimoto, Akiharu× Kawae, Takeshi× Ito, H.× Masugata, Katsumi |
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著者別表示 |
森本, 章治
× 森本, 章治× 川江, 健 |
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提供者所属 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 金沢大学設計製造技術研究所 / 金沢大学理工研究域電子情報通信学系 | |||||
書誌情報 |
Physics Letters, Section A: General, Atomic and Solid State Physics 巻 375, 号 33, p. 3007-3011, 発行日 2011-08-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0375-9601 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00774015 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1016/j.physleta.2011.06.043 | |||||
出版者 | ||||||
出版者 | Elsevier B.V. | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Preferentially-oriented aluminum nitride (AlN) films are grown directly on natively-oxidized Si (100) substrate by pulsed laser deposition (PLD) in nitrogen (N2) environment. The AlN preferential orientation changes from (002) to (100) with increasing N2 pressure. Such different behaviors are discussed in terms of deposition-rate-dependent preferential orientation, kinetic energy of depositing species and confinement of laser plume. Finally, sample deposited at 0.9 Pa is proved to have the highest (002) peak intensity, the lowest FWHM value, the highest deposition rate and a relatively low RMS roughness (1.138 nm), showing the optimal growth condition for c-axis-oriented AlN growth at this N2 pressure. © 2011 Elsevier B.V. All rights reserved. | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://www.elsevier.com/locate/issn/03759601 |