{"_buckets": {"deposit": "1d2fb946-b5a8-477a-a54f-78132419f75b"}, "_deposit": {"created_by": 3, "id": "9266", "owners": [3], "pid": {"revision_id": 0, "type": "depid", "value": "9266"}, "status": "published"}, "_oai": {"id": "oai:kanazawa-u.repo.nii.ac.jp:00009266", "sets": ["936"]}, "author_link": ["399", "13286", "13287"], "item_4_biblio_info_8": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2011-01-01", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "O37", "bibliographicPageEnd": "1036", "bibliographicPageStart": "1035", "bibliographicVolumeNumber": "2011S", "bibliographic_titles": [{"bibliographic_title": "精密工学会学術講演会講演論文集"}]}]}, "item_4_description_21": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "高精度3次元形状計測法の一つに白色干渉顕微鏡がある。この計測方法は縦方向に高い分解能を有するが、外力による振動に弱いという問題があった。この要因として、干渉像の露光中に測定対象が動くために正確な位相が得られないことが挙げられる。本研究では専用に開発したレーザ変位計を用いてリアルタイムに光路差(対象物ステージ移動量)を測定し、露光中の光路差変化量と白色干渉像から正確に位相を抽出する補正法を開発した。", "subitem_description_type": "Abstract"}]}, "item_4_publisher_17": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "精密工学会 = The Japan Society for Precision Engineering"}]}, "item_4_relation_12": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isIdenticalTo", "subitem_relation_type_id": {"subitem_relation_type_id_text": "10.11522/pscjspe.2011S.0.1035.0", "subitem_relation_type_select": "DOI"}}]}, "item_4_relation_28": {"attribute_name": "関連URI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/", "subitem_relation_type_select": "URI"}}, {"subitem_relation_type_id": {"subitem_relation_type_id_text": "http://www.jspe.or.jp/", "subitem_relation_type_select": "URI"}}]}, "item_4_rights_23": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright © The Japan Society for Precision Engineering"}]}, "item_4_version_type_25": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "丹羽, 康人"}], "nameIdentifiers": [{"nameIdentifier": "13286", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "安達, 正明"}], "nameIdentifiers": [{"nameIdentifier": "399", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "50212519", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://kaken.nii.ac.jp/ja/search/?qm=50212519"}, {"nameIdentifier": "50212519", "nameIdentifierScheme": "研究者番号", "nameIdentifierURI": "https://nrid.nii.ac.jp/nrid/1000050212519"}]}, {"creatorNames": [{"creatorName": "岩尾, 雄太"}], "nameIdentifiers": [{"nameIdentifier": "13287", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2017-10-03"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "TE-PR-ADACHI-M-1035.pdf", "filesize": [{"value": "540.9 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 540900.0, "url": {"label": "TE-PR-ADACHI-M-1035.pdf", "url": "https://kanazawa-u.repo.nii.ac.jp/record/9266/files/TE-PR-ADACHI-M-1035.pdf"}, "version_id": "d5b6fe94-a240-4717-baa4-d815ab117982"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "白色干渉", "subitem_subject_scheme": "Other"}, {"subitem_subject": "振動", "subitem_subject_scheme": "Other"}, {"subitem_subject": "垂直走査", "subitem_subject_scheme": "Other"}, {"subitem_subject": "位相抽出", "subitem_subject_scheme": "Other"}, {"subitem_subject": "ナノメーター", "subitem_subject_scheme": "Other"}, {"subitem_subject": "white-light", "subitem_subject_scheme": "Other"}, {"subitem_subject": "nterferometer", "subitem_subject_scheme": "Other"}, {"subitem_subject": "vibration", "subitem_subject_scheme": "Other"}, {"subitem_subject": "vertical scanning", "subitem_subject_scheme": "Other"}, {"subitem_subject": "phase extraction", "subitem_subject_scheme": "Other"}, {"subitem_subject": "nanometer", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "振動環境下で撮影された白色干渉像からの高精度位相抽出", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "振動環境下で撮影された白色干渉像からの高精度位相抽出"}]}, "item_type_id": "4", "owner": "3", "path": ["936"], "permalink_uri": "http://hdl.handle.net/2297/45023", "pubdate": {"attribute_name": "公開日", "attribute_value": "2017-10-03"}, "publish_date": "2017-10-03", "publish_status": "0", "recid": "9266", "relation": {}, "relation_version_is_last": true, "title": ["振動環境下で撮影された白色干渉像からの高精度位相抽出"], "weko_shared_id": -1}