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半導体レーザを用いた段差を持つ粗面の形状計測: 3波長での位相測定を用いる方法
http://hdl.handle.net/2297/42439
http://hdl.handle.net/2297/424391cf1c75f-7ee1-4a90-a2d5-9f60aec9a864
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
TE-PR-ADACHI-M-418.pdf (532.4 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-10-03 | |||||
| タイトル | ||||||
| タイトル | 半導体レーザを用いた段差を持つ粗面の形状計測: 3波長での位相測定を用いる方法 | |||||
| タイトル | ||||||
| タイトル | Shape Measurement of Rough Step Like Surface using a Laser Diode: The Method with Three-wavelength Phase Shifting | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
安達, 正明
× 安達, 正明× 北川, 洋一× 松本, 哲也× 稲部, 勝幸 |
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| 書誌情報 |
精密工学会誌 = Journal of the Japan Society for Precision Engineering 巻 65, 号 3, p. 418-422, 発行日 1999-01-01 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0912-0289 | |||||
| NCID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AN1003250X | |||||
| DOI | ||||||
| 関連タイプ | isIdenticalTo | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.2493/jjspe.65.418 | |||||
| 出版者 | ||||||
| 出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | The authors propose a new method which can measure a shape of rough step like surface by means of a speckle interferometry with a wavelength-changeable laser. A speckle phase available in the interferometry is usually affected not only by an optical path difference but also by a random component associated with surface roughness. The phase shifting method using two different wavelengths (λ1, λ2) is, therefore, limited to a single phase map about the optical path difference, because of the random component which remains without cancel. The single phase map is available only for the calculation of the shape of a continuous surface. In the proposed method, the authors use three different wavelengths (λ1, λ2, λ3) to obtain a double phase map, which is capable of a discontinuous surface shape calculation by means of a fringe-counting two-wavelength method. The validity of the method is experimentally demonstrated and discussion is extended to an accuracy of the measurement and an extent of the measurement range. | |||||
| 権利 | ||||||
| 権利情報 | Copyright © The Japan Society for Precision Engineering 精密工学会 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| 関連URI | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://www.jstage.jst.go.jp/browse/jjspe/-char/ja/ | |||||
| 関連URI | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://www.jspe.or.jp/ | |||||
