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Particle composition of high-pressure SF/sub6/ plasma with electron temperature greater than gas temperature
http://hdl.handle.net/2297/1802
http://hdl.handle.net/2297/180225d4e885-d00f-4aad-9dca-36b739c130f1
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
00649615.pdf (174.9 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-10-03 | |||||
| タイトル | ||||||
| タイトル | Particle composition of high-pressure SF/sub6/ plasma with electron temperature greater than gas temperature | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
Tanaka, Yasunori
× Tanaka, Yasunori× Yokomizu, Yasunobu× Ishikawa, Motohiro× Matsumura, Toshiro |
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| 書誌情報 |
IEEE Transaction on Plasma Science 巻 25, 号 5, p. 991-995, 発行日 1997-10-01 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 00933813 | |||||
| DOI | ||||||
| 関連タイプ | isIdenticalTo | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1109/27.649615 | |||||
| その他の識別子 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | AA0066803X | |||||
| 出版者 | ||||||
| 出版者 | IEEE | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Numerical computation was performed to derive particle compositions of high-pressure SF6 plasmas in which the electron temperature Te is greater than the gas temperature T g. The effective excitation temperature Tex for each of particles was proposed to express the distribution of particles in excited states. Furthermore, the relation equations for chemical equilibrium in a two-temperature plasma were developed on the basis of the second law of thermodynamics. At fixed Tg in the range of 6000-9000 K, the increasing Te from 9000-20 000 K encourages the dissociation and ionization of particles, causing the composition of SF6 plasma at 0.1 MPa to differ markedly from the composition under the condition of thermal equilibrium | |||||
| 権利 | ||||||
| 権利情報 | Copyright (C) 1997 IEEE.. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE..IEEE Transaction on Plasma Science 25(5),pp.991-995 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
