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  1. H-4. 設計製造技術研究所
  2. h-4 10. 学術雑誌掲載論文
  3. 1. 査読済論文

CO2パルスレーザによるサファイアウエハの熱応力割断

https://doi.org/10.24517/00008934
https://doi.org/10.24517/00008934
dd5e4b70-477c-4a4f-ae7e-83c823c4918f
名前 / ファイル ライセンス アクション
TE-PR-UEDA-T-424.pdf TE-PR-UEDA-T-424.pdf (955.8 kB)
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Item type 学術雑誌論文 / Journal Article(1)
公開日 2017-10-03
タイトル
タイトル CO2パルスレーザによるサファイアウエハの熱応力割断
タイトル
言語 en
タイトル Journal of the Japan Society for Abrasive Technology
言語
言語 jpn
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
ID登録
ID登録 10.24517/00008934
ID登録タイプ JaLC
著者 上田, 隆司

× 上田, 隆司

WEKO 10422
e-Rad 60115996
研究者番号 60115996

上田, 隆司

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三野, 大樹

× 三野, 大樹

WEKO 12725

三野, 大樹

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古本, 達明

× 古本, 達明

WEKO 269
e-Rad 60432134
金沢大学研究者情報 60432134
研究者番号 60432134

古本, 達明

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細川, 晃

× 細川, 晃

WEKO 280
e-Rad 60432134
金沢大学研究者情報 40199493
研究者番号 40199493

細川, 晃

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長友, 正平

× 長友, 正平

WEKO 12726

長友, 正平

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著者別表示 Ueda, Takashi

× Ueda, Takashi

WEKO 71650
e-Rad 60115996

Ueda, Takashi

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Furumoto, Tatsuaki

× Furumoto, Tatsuaki

WEKO 71368
e-Rad 60432134