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CO2パルスレーザによるサファイアウエハの熱応力割断
https://doi.org/10.24517/00008934
https://doi.org/10.24517/00008934dd5e4b70-477c-4a4f-ae7e-83c823c4918f
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2017-10-03 | |||||
タイトル | ||||||
タイトル | CO2パルスレーザによるサファイアウエハの熱応力割断 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Journal of the Japan Society for Abrasive Technology | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
ID登録 | ||||||
ID登録 | 10.24517/00008934 | |||||
ID登録タイプ | JaLC | |||||
著者 |
上田, 隆司
× 上田, 隆司× 三野, 大樹× 古本, 達明× 細川, 晃× 長友, 正平 |
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著者別表示 |
Ueda, Takashi
× Ueda, Takashi× Furumoto, Tatsuaki
WEKO
71368
|