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振動環境でも利用できる垂直走査型光干渉応用形状計測技術
http://hdl.handle.net/2297/42437
http://hdl.handle.net/2297/424375891f333-77b9-463e-a5b1-90962ad2979e
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2017-10-03 | |||||
タイトル | ||||||
タイトル | 振動環境でも利用できる垂直走査型光干渉応用形状計測技術 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Vertical-Scanning Shape-Measurement Interferometry Applicable under Vibrating Environment | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
安達, 正明
× 安達, 正明× 平野, 勇輝× 河村, 昌範× 岩尾, 雄太 |
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書誌情報 |
精密工学会誌 = Journal of the Japan Society for Precision Engineering 巻 75, 号 11, p. 1299-1304, 発行日 2009-01-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0912-0289 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN1003250X | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.2493/jjspe.75.1299 | |||||
出版者 | ||||||
出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Vertical-scanning shape-measurement interferometry using white light is widely used to measure 3D shape of objects having step-like shape. This interferometry however cannot be used under vibrating environment. Because, it is required to accurately repeat predefined-step movements over vertical measurement range. We developed new technology which can measure the changes of optical path difference (OPD) of an interference microscope with nanometer resolution. This uses a line camera and a FPGA device and can measure OPD changes with around 20-μs interval. We built this technology onto a vertical-scanning interferometer and estimated performance of the developed technology using some vibration conditions. | |||||
権利 | ||||||
権利情報 | Copyright © The Japan Society for Precision Engineering 精密工学会 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/browse/jjspe/-char/ja/ | |||||
関連URI |